喷砂器,喷砂装置;
Before the experiment, the thin sand paper was first employed to nick the wafer for 5 minutes. The diamond abrasive abraded the wafer for 15 minutes. Then the wafer was cleaned in the deionized water by the ultrasonic and was dried by the blower.
在沉积实验之前,首先用细砂纸将硅片打磨5分钟,金刚石研磨膏研磨硅片15分钟,用去离子水冲洗,超声波清洗,取出后吹风机烘干,然后放入反应室沉积金刚石薄膜。
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